Varian VHS-6 Manual de instrucciones

INSTRUCTION MANUALvacuum technologiesVHS-4, VHS-6 and VHS-250Diffusion PumpsPart No. 699901024Revision AFebruary 2005(505)872-0037idealvac.comidealvac

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps xiTables1-1 Pump Operational Specifications ...

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps xiiiPrefaceInstructions for UseThis equipment is designed for use by professionals. Read this instruction man

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xivSafetyDiffusion Pump HazardsDesigners of systems utilizing diffusion pumps must design out hazards whereve

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xvGeneral HazardsHazard Suggested Corrective ActionLoss of utility: water and/or electricity Provide sufficie

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xviExplosionOperation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar) or witho

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xviiExplosive ConditionsProhibited Action Explosion-Causing ConditionDo not run pump without cooling water. O

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xviiiPressurization HazardsLarge vacuum pumps and their components are designed for vacuum service. They are

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xixDangerous SubstancesChemical Dangers of Acetone and Alcohol Diffusion pumps are typically cleaned with ace

Copyright 2005Vacuum TechnologiesVHS-4, VHS-6 and VHS-250Diffusion Pumps

VHS-4, VHS-6 and VHS-250 Diffusion Pumps xxHigh TemperaturesHot SurfacesBoiler temperatures reach 530 °F (275 °C) which can cause serious burns. Alway

1-1VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/05Section 1. Introduction and Installation 1.1 IntroductionBefore unpacking and installing a VHS

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1-2DRAFT 3/9/05Backstreaming Rate at Pump Inlet 5x10−4 mg/cm2/minute (with std cold cap)Electrical Requireme

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/051-3Heater circuit resistance (ohms) VHS-4: 1450 watts120 V – 10 208 V – 29.8240 V – 39.7VHS-6 and

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1-4DRAFT 3/9/05Figure 1-1 shows the VHS-4 speed and throughput curves.Figure 1-1 VHS-4 Speed and Throughput C

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/051-5Table 1-2 lists the VHS-4 dimensions.Table 1-2VHS-4 DimensionsASA ISO Conflatin mm in mm in mm

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1-6DRAFT 3/9/05Figure 1-3 shows the VHS-6 speed and throughput curves.Figure 1-3 VHS-6 Speed and Throughput C

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/051-7Table 1-3 lists the VHS-6 dimensions.Table 1-3 VHS-6 DimensionsASA ISO Conflatin mm in mm in m

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1-8DRAFT 3/9/05Figure 1-5 shows the VHS-250 speed and throughput curves.Figure 1-5 VHS-250 Speed and Throughp

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/051-9Table 1-4 lists the VHS-250 dimensions.Table 1-4 VHS-250 DimensionsISOin mmHeight 22.79 579Cen

VHS-4, VHS-6 and VHS-250 Diffusion Pumps iiiWarrantyProducts manufactured by Seller are warranted against defects in materials and workmanship for twe

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1-10DRAFT 3/9/051.2 InstallationInstallation consists of:❑ Section 1.2.2 “Unpacking”❑ Section 1.2.3 “Pump Oil

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/051-111.2.4 Vacuum System ConnectionsWARNING Utility failure can cause damage to the equipment, ove

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1-12DRAFT 3/9/05❑ The minimum rating of this system should be 85% of the maximum power rating of the diffusio

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/051-131.2.7 Thermal SwitchThe pump has been fitted with a manually-resettable thermal switch that i

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2-1VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 2/24/05Section 2. OperationCAUTION ❑ Before turning on the heater, ensure there is fluid in the pump

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 2-2DRAFT 2/24/055. Monitor inlet and foreline pressures.During operation of the diffusion pump:❑ The gas load

3-1VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/05Section 3. Maintenance and Service3.1 General MaintenanceDiffusion pumps generally require lit

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3-2DRAFT 3/9/05❑ Ensure that the cooling water flow is adequate and unobstructed. In areas where the mineral

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/053-33.4 VHS-4 and VHS-6 Cold Cap Removal/InstallationTo remove the cold cap:1. Remove the spring (

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3-4DRAFT 3/9/053.5 VHS-250 Cold Cap Removal/InstallationTo remove the cold cap:1. Remove the spring (J) attac

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/053-53.6 Jet Assembly Removal/InstallationTo remove the jet assembly:1. Remove the cold cap from th

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3-6DRAFT 3/9/05Figure 3-3 VHS-4 Diffusion Pump Jet AssemblyJet CapJet PlugInner Rod2nd Stage Drip Shield3rd S

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/053-7Figure 3-4 VHS-6 and 250 Diffusion Pump Jet Assembly

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3-8DRAFT 3/9/053.7 Heater ReplacementRefer to Figure 3-5 (VHS-6 and VHS-250) and Figure 3-6 (VHS-4) for this

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/053-9Figure 3-6 VHS-4 Heater MountingHeater Element647304205 1450 W, 120 V647304210 1450 W, 208 V64

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3-10DRAFT 3/9/053.8 Pump Fluid ChargeThe recommended fluid charge is:❑ 300 cc for the VHS-4❑ 500 cc for VHS-6

4-1VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/05Section 4. Troubleshooting4.1 LeakageAnalysis of general operational experience with diffusion

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 4-2DRAFT 3/9/054.3 Poor Pump or System PerformanceBefore proceeding with a step-by-step troubleshooting progr

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/054-3Inlet pressure surges Incorrect heater voltage. Check and correct voltage.Fluid outgassing. Co

Varian, Inc. declare under our sole responsibility that the product,erklären, in alleniniger Verantwortung, daß dieses Produkt,déclarons sous notre se

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/055-1Section 5. Replacement PartsTable 5-1 lists the VHS-4 models.Table 5-2 lists the VHS-4 replace

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 5-2DRAFT 3/9/05Table 5-3 lists the VHS-6 models.Table 5-4 lists the VHS-6 replacement parts available from Va

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/055-3Table 5-4 VHS-6 Replacement PartsPart Number Description 86488301 Standard Cold Cap Assembly

VHS-4, VHS-6 and VHS-250 Diffusion Pumps 5-4DRAFT 3/9/05Table 5-5 lists the VHS-250 models.Table 5-6 lists the VHS-250 replacement parts available fro

VHS-4, VHS-6 and VHS-250 Diffusion Pumps DRAFT 3/9/055-586088301 Heater Cover PlateL8998001 Heater Insulating BlanketL8997001 Heater CoverK0377178 O-R

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Request for Return Health and Safety Certification1. Return authorization numbers (RA#) will not be issued for any product until this Certificate is c

Request for ReturnHealth and Safety CertificationFAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing fa

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Sales and Service Offices12/04CanadaCentral coordination through:Varian, Inc.121 Hartwell AvenueLexington, MA 02421USATel: (781) 861 7200Fax:(781) 860

VHS-4, VHS-6 and VHS-250 Diffusion Pumps viiContentsIntroduction ...

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VHS-4, VHS-6 and VHS-250 Diffusion Pumps ixFigures1-1 VHS-4 Speed and Throughput Curves ................